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Recipricating Rotary Feedthrough (SWRP)

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[Basic Infomation]
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[Sealink Corp]

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Product Detail Information

Recipricating&Rotary Feedthrough (SWRP)



│ Description │

SWRP is a sealing unit, which seals a shaft is rotating and reciprocating at the same time of chamber of high pressure or high vacuum states of LCD or Semiconductor processing lines.
* Applications : Vacuum Robot, ALD, CVD, Auto Clave, Special Vacuum & High Pressure Equipment.



│ Specification │

Pressure Range

Vacuum

< 1 x 10-8Torr

Pressure

< 15 Bar

Leakage Rate

Vacuum

< 7.5 x Pa· /s
by Helium Leak Detector

Pressure

<0.1psi/min by Nitrogen Gas

Stroke Length of Shaft

0 ~ 4000mm

Temperature Range

-25 ~ 150℃

Media

Reactive Gas, Inert Gas, Water, Liquid, Etc..

Speed

0 ~ 200RPM, Max 3m/s

Shaft dia

∅6 ~ 1100mm

Material

Housing

Stainless Steel 304, 316L or Special

Shaft

Stainless Steel 304, 316L or Special

Bearing

SUHJ2 or Special



Attached File