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Rotary Sealing UNIT (SWRU)

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[Basic Infomation]
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[Sealink Corp]

  • South Korea South Korea
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Product Detail Information

Rotary Sealing UNIT (SWRU)



│ Description │

SWRU is a combined sealing unit, which supplies various different reactive gases through each ports and also, seals rotating shaft between atmosphere side and vacuum chamber, when deposition wafer under High Vacuum states of LCD or Semiconductor processing lines.
SWRU can be widely used in the various fields of industries such as semiconductor, chemical, petrochemical, pharmaceutical and food industry.



│ Specification │

Pressure Range

Vacuum

< 1 x 10-8Torr

Pressure

< 15 Bar

Leakage Rate

Vacuum

< 7.5 x Pa· /s
by Helium Leak Detector

Pressure

<0.1psi/min by Nitrogen Gas

No. of port

1 ~ 14

Temperature Range

-25 ~ 150℃

Media

Reactive Gas, Inert Gas, Water, Liquid, Etc..

Speed

0 ~ 1500RPM, Max 10m/s

Shaft dia

∅15 ~ 1100mm

Material

Housing

Stainless Steel 304, 316L or Special

Shaft

Stainless Steel 304, 316L or Special

Bearing

SUHJ2 or Special